Folkersma, Steven ; Bogdanowicz, Janusz ; Favia, Paola ; Wouters, Lennaert ; Petersen, Dirch Hjorth ; Hansen, Ole ; Henrichsen, Henrik Hartmann ; Nielsen, Peter Former ; Shiv, Lior ; Vandervorst, Wilfried
in: Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures, vol: 39, issue: 2
Type: Journal article (Peer reviewed)
Status:
Published
| År:
2021
| DOI:
https://doi.org/10.1116/6.0000921